The method of the adaptively controlled process of synthesis and laser correction parameters of metal-semiconductor contacts for basic logic elements of digital devices and sensors of information-measurement and control systems was proposed. Expediency, advantages and disadvantages of use of self adaptive and self-reconfigurable of computer tools for solving technological problems of micro and nanoelectronics are described. It is determined, that functional efficiency, versatility and economic performance of the system can be increase through the use of multifunctional reconfigurable computer systems for process control and data processing. The use of intelligent measuring converters for data acquisition allowed to provide the flexibility, versatility and scalability of the system, simplifying software development, and provides remote access for telemetry measuring of the object parameters and process equipment. Keywords: semiconductor; Shottki diode; structural defect; laser annealing technology; self-adaptive system; self-reconfigurable computer.
