53 | Defe | Defect recognition and image processing in semiconductors 1997 [Текст] : Proceedings of the Seventh International conference on defect recognition and image processing in semiconductors (DRIP 7) held in Templin, Germany, 7-10 September 1997 / Edited by J.Donecker and I.Rechenberg. — Bristol; Philadelphia : Institute of physics, 1998. — 20,524p. |
| ISBN 0-7503-0500-2 | |
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