621.382.8(063)
I69 3	Integrated micromotion systems.Micromachining     A collection of contributions based on lectures presented at the third Toyota conference, Aichi, Japan, 22-25 october 1989 [Текст] / ed. by F. Harashima. — Amcterdam etc. : Elsevier, 1990. — 462 p.
ISBN 0-444-88417-3