Lobur, Mykhaylo     The prospects of micro- and nanoelectromechanical systems development [Текст] / Mykhaylo Lobur // Computer science and information technologies CSIT 2010 : proc. of the V Intern. sci. and techn. conf., 14-16 Oct. 2010, Lviv, Ukraine / Lviv Polytechnic Nat. Univ. — Lviv : Publ. House Vezha & Co, 2010. — P. 146-148.