| | Kogut, I. T. 3D SOI elements for silicon-on-chip applications [Текст] / I.T. Kogut, A.A. Druzhinin, V.I. Golota // 1st Ukrainian-French seminar "Semiconductor-on-insulator materials, devices and circuits: physics, technology and diagnostics". 6th International semOI workshop "Nanoscaled semiconductor-on-insulator materials, sensors and deevices" : conf. abstr., 26-30 Apr., 2010, Kyiv, Ukraine. — Kyiv, 2010. — P. 46-47. |
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