Teslyuk, Vasyl     A model for analyzing the MEMS structure bazed on queuing system [Текст] / Vasyl Teslyuk, Oksana Stetsyna // Computer science and information technologies CSIT 2010 : proc. of the V Intern. sci. and techn. conf., 14-16 Oct. 2010, Lviv, Ukraine / Lviv Polytechnic Nat. Univ. — Lviv : Publ. House Vezha & Co, 2010. — P. 319.