621.382.8(063) | P47 3 | Perspective technologies and methods in MEMS Design [Текст] : pros. of VIII-th Intern. conf. MEMSTECH'2012, 18-21 april 2012, Polyana, Ukraine / Min. of education and science, youth and sport of Ukraine, Lviv Polytechnic Nat. Univ. — Lviv : Publ. Lviv Polytechnic, 2012. — 238 p. |
| ISBN 978-617-6-7-229-4 | |
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