| | Druzhynin, Anatoliy Accelerometer sensing element based on nanostructured silicon [Текст] / Anatoliy Druzhynin, Igor Kogut, Yuriy Khoverko, Viktor Golota // Computational problems of electrical engineering / Lviv Polytechnic nat. univ. ; ed.-in-chief Yuriy Bobalo. — Lviv : lviv Polytechnic nat. univ., 2012. — P. 11-15. |
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