621.382.8(063) | P47 3 | Perspective technologies and methods in MEMS design [Текст] : proc. of IXth Intern. conf., 16-20 Apr. 2013, Polyana, Ukraine / Lviv Polytechn. Nat. Univ. — Lviv : Lviv Polytechnic Publ. House, 2013. — 190 p. |
| ISBN 978-617-607-424-3 | |
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