Tkachenko, N.     Quality of MEMS production ensuring by minimisation of its not quality [Текст] / N. Tkachenko, Ye. Fedorchuk, I. Yurchak // Perspective technologies and methods in MEMS design : proc. of IXth Intern. conf., 16-20 Apr. 2013, Polyana, Ukraine / Lviv Polytechn. Nat. Univ. — Lviv : Lviv Polytechnic Publ. House, 2013. — P. 38-39.