| | Sarelo, Katarzyna Computer-aided optical detection for silicon mems pressure sensor [Текст] / Katarzyna Sarelo, Jan Dziuban, Danylo Lizanets, Mykhaylo Lobur // Perspective technologies and methods in MEMS design : proc. of Xth Intern. conf., 22-24 June 2014, Lviv, Ukraine / Lviv Polytechn. Nat. Univ. — Lviv : Lviv Polytechnic Publ. House, 2014. — P. 8-13. |
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