621.3.049.77(063) | P47 3 | Perspective technologies and methods in MEMS design (MEMSTECH 2016) [Текст] : pros. of ХІІ-th Intern. Conf., 20-24 april 2016, Lviv - Polyana, Ukraine / Min. of Education and Science of Nkraine, Lviv Polytechnic Nat. Univ. — Lviv : Lviv Polytechnic Publ. House, 2016. — 240 p. |
| ISBN 978-617-607-913-2 | |
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