Matviykiv, Oleh     An overview of multiscale modeling techniques and methods for MEMS simulation [Текст] / Oleh Matviykiv, Oleksandr Halushko // Perspective technologies and methods in MEMS design (MEMSTECH 2016) : pros. of ХІІ-th Intern. Conf., 20-24 april 2016, Lviv - Polyana, Ukraine / Min. of Education and Science of Nkraine, Lviv Polytechnic Nat. Univ. — Lviv : Lviv Polytechnic Publ. House, 2016. — P. 9-11.